![]() ![]() Interest in piezoMEMS technology began around the early 1990s as scientists explored alternatives to electrostatic actuation in radio frequency (RF) microelectromechanical systems (MEMS). PiezoMEMS can be found in a variety of applications, such as switches, inkjet printer heads, sensors, micropumps, and energy harvesters. ![]() It is a microelectromechanical system that takes advantage of an electrical potential that appears under mechanical stress. 22 July 2019.A piezoelectric microelectromechanical system (piezoMEMS) is a miniature or microscopic device that uses piezoelectricity to generate motion and carry out its tasks. Principles of Lithography, Second Edition. What Happened To Nanoimprint Litho? 29 March 2018. "Nanoimprint Lithography – Patterning of Resists Using Molding." Springer Handbook of Nanotechnology. Learn more about the high stiffness and force of piezoelectric actuators in a compact envelope only available from Dynamic Structures and Materials. The high feature transfer forces required for NIL may be subsequently obtained using piezoelectric actuators with relatively high stiffness values. Many DSM amplified piezoelectric actuators are specially designed to have high force and stiffness characteristics. ![]() Can Piezo Actuators Meet Precision and Force Requirements? Additional industrial applications include precision fluid regulation in semiconductor production, precision dispensing of industrial process fluids, precision adjustment/alignment in bearing machining operations. Applications in dispensing of engine fuels (fuel injectors) are some of the most significant high temperature applications for piezoelectric stack actuators. With the correct selection of piezoceramic formulation, temperature specifications to >200 C may be achieved. Avoiding the use of lubricants,magnetic materials and sliding surfaces, flexure-based piezoelectric actuators may provide significant stamping displacements and forces in ultrahigh vacuum compatible configurations. Piezoelectric actuators have a proven record of producing nanometer level movement and position repeatability in ultrahigh vacuum environments. Precision Nanoimprinting in Vacuum Environments? Consider DSM’s FPA550EHK (500+ microns with Extra High Stiffness ( K))or call an engineer to create a customized actuator today. The dependency on precision feature transfer (stamping) actions with accuracy or resolution at the nanometer level suggests a role for precision amplified piezoelectric actuators.Īctuate and align your imprint applications using Dynamic Structures & Materials’ high stiffness and fast response piezoelectric actuators. Nanoimprint technology produces nanometer level features on the desired wafer or other type of production substrate. Like a stamping process, the patterned template is pressed against the substrate, forming a pattern on the substrate at feature sizes down to 5nm and beyond.” ![]() Then, a separate substrate is coated with a resist. Initially, a lithographic system forms a pattern on a template based on a pre-defined design. NIL is different than conventional lithography and resembles a stamping process. Flexure-guided mechanically-amplified piezoelectric actuators may provide a direct production role as the production process may involve extreme environments (thermal, vacuum, or vibration).Īn article from Semiconductor Engineering (Lapedus) states "Canon, EV Group, Nanonex, Suss and others continue to develop and ship NIL systems for a range of markets. It may also incorporate other nano-level processes (Canon Global Encyclopedia Wikipedia Lapedus Tech Briefs). Nanoimprint lithography generally includes precision resin deposition, precise feature transfer through pressure (imprinting), and curing of the resin system. Consequently, nanoimprint lithography (NIL) may be an exciting opportunity for piezoelectric actuators. "An imprinting machine needs a precise pressing mechanism with high requirements on mechanical stiffness, uniformity, and homogeneity over large area" (Kristensen and Schift). ![]()
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